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SEMI Standards Educational Series for E10 and E79
SEMI E10 and SEMI E79 are the two most widely used equipment performance metrics Specification Standards in the semiconductor and other related high-tech areas. SEMI E10 provides the methodologies needed for measuring and evaluating equipment reliability, availability, and maintainability (RAM) and utilization performance. SEMI E79 provides the methodologies needed for measuring and evaluating the productivity […]
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Voltage Sag for Manufacturing Fabs Overview
SEMI F47, Specification for Semiconductor Processing Equipment Voltage Sag Immunity, widely adopted across the industry, is the governing standard that defines voltage sag test levels and requirements for semiconductor tools. Since the implementation of SEMI F47, the vulnerability of semiconductor manufacturing to single-phase and two-phase voltage sags has improved greatly. However, semiconductor manufacturers continue to […]
