Microsystems deal with the miniature mechanical mechanisms with embedded electronic elements fabricated by technologies similar to microelectronics. The synergy between fabrication technology and design will be demonstrated on various devices with piezo-resistive feedback. Based on device specifications this course addresses the whole development cycle, incl. selection of materials and exploitable technology, as well as the design of different functional elements. The impact of different process steps and design parameters on microsystems’ performance is illustrated, emphasising the options for technology or layout modifications. Examples of specific applications of cantilevers and in-plane moveable flexure mechanisms are in-depth analysed.
| COURSE TITLE | Fabrication of Silicon Microsystems with Piezo-resistive Feedback |
| COURSE PLATFORM | Moodle |
| COURSE WEB | https://moodle-tus.ecovem.eu/ |
| ACCESS INFORMATION | Self-registration. Previously students must create an account in the Moodle platform |
| PROVIDER INSTITUTION | Technical University of Sofia (TUS), AMG Technology and MASHO |
| PROVIDER CONTACT | name: Prof. Slavka Tzanova email: Slavka.tzanova@tu-sofia.bg |
| TEACHERS | T1- Vladimir Stavrov |
| TYPE OF COURSE | ☒ On-line (stand-alone) ☒ On-site training |
| DATES EXPECTED OPENING | October 2023 |
| DATES AVAILABILITY | ☒ 365 days accessible ☒ Other (specify): work-based training in the company on days defined by AMG Technology |
| WORKLOAD STUDENT (in hours) | 120 hours |
| TYPE OF TRAINING | ☒ Initial VET ☒ Continuous VET ☒ Work-based training |
| EQF LEVELS | ☒ EQF 5 ☒ EQF 6 ☒ EQF 7 |
| LANGUAGES | ☒ English ☒ Others (specify): Bulgarian |
| MAIN SUBJECT | ☒ Design and manufacture of PCB ☒ Integrated circuits design ☒ System design ☒ Fundamentals of microelectronics manufacturing |
| COURSE DESCRIPTION | Microsystems deal with the miniature mechanical mechanisms with embedded electronic elements fabricated by technologies similar to microelectronics. The synergy between fabrication technology and design will be demonstrated on various devices with piezo-resistive feedback. Based on device specifications this course addresses the whole development cycle, incl. selection of materials and exploitable technology, as well as the design of different functional elements. The impact of different process steps and design parameters on microsystems’ performance is illustrated, emphasising the options for technology or layout modifications. Examples of specific applications of cantilevers and in-plane moveable flexure mechanisms are in-depth analysed. |
| KEYWORDS | K1- Microsystems K2- Piezoelectric effect K3- Sensors and actuators |
| LEARNING OBJECTIVES | LO1- Technological processes for microsystem fabrication LO2- Piezo-electric effect and its application in sensors and actuators LO3- Materials for microelectronics convenient for microsystems with piezoelectric devices LO4- Microsystems’ design rules LO5- Microsystems fabrication processes LO6- Measurement and tests of microsystems |
| PREREQUISITES | Microsystems’ related fundamentals of: P1- Material science P2- Microelectronics technologies P3- Methods for control and analyses of fabrication processes P4- Basic knowledge for compliant mechanisms |