Ultra-Pure Water & Liquid Chemicals Quality Control Webinar : SEMI Standards Enabling Proactive Yield Management for Advanced Nodes – Particles Control

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COURSE TITLEUltra-Pure Water & Liquid Chemicals Quality Control Webinar : SEMI Standards Enabling Proactive Yield Management for Advanced Nodes – Particles Control
COURSE PLATFORMVimeo
COURSE WEBhttps://discover.semi.org/ultrapure-water-webinar-registration.html
ACCESS INFORMATIONhttps://discover.semi.org/ultrapure-water-webinar-registration.html
PROVIDER INSTITUTION SEMI
PROVIDER CONTACTname: Laura Nguyen, Paul Trio email: lnguyen@semi.org, ptrio@semi.org
TEACHERST1- Slava Libman, FTD Solutions
T2- Gary Van Schooneveld, CT Associates
TYPE OF COURSE☒ On-line (stand-alone)
DATES EXPECTED OPENINGAvailable now
DATES AVAILABILITY☒ 365 days accessible
WORKLOAD STUDENT0.5 hours
ECTS
ECVET points
TYPE OF TRAINING☒ Work-based training
EQF LEVELS☒  EQF 3  
LANGUAGES☒  English
MAIN SUBJECT☒ Fundamentals of microelectronics manufacturing
COURSE DESCRIPTIONThis course describes the SEMI Standards enabling advanced processes contamination control and provides a case study of the use of specific SEMI Standards to address pressing industry needs.
 
The webinar has been recorded with the goal of assisting semiconductor and supply chain professionals involved in the many aspects of contamination control, including UPW and liquid chemical suppliers dealing with liquid treatment and delivery systems.
 
Technical Background
Advanced semiconductor manufacturing has reached the current limits of metrology measuring contamination on both the wafers and in the high purity materials. Furthermore, ability of the most advanced filters to control particles in sub-10nm range is also limited. Finally, particle shedding of sub-10nm particles from high-purity components located post-filter cannot be directly measured and only be estimated using power-law extrapolation.
 
The Liquid Chemical Technical Committee – within the SEMI Standards Program – works closely with the Yield Enhancement IFT – an internationally-focused team within the IRDS – to establish the methodology to enable proactive technology management in the space of contamination control.
KEYWORDSKW1-standards
KW2-ultrapure water, UPW
KW3-liquid chemicals
KW4-contamination control
KW5-advanced node
KW6-yield enhancement
KW7-quality control
Add as many lines as needed
LEARNING OBJECTIVESLO1- Provide an overview of SEMI Standards enabling advanced processes contamination control and provides a case study of the use of specific SEMI Standards to address pressing industry needs.
LO2- Assist semiconductor and supply chain professionals involved in the many aspects of contamination control, including UPW and liquid chemical suppliers dealing with liquid treatment and delivery systems
PREREQUISITESNo entry requirements

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