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COURSE TITLE | Ultra-Pure Water & Liquid Chemicals Quality Control Webinar : SEMI Standards Enabling Proactive Yield Management for Advanced Nodes – Particles Control |
COURSE PLATFORM | Vimeo |
COURSE WEB | https://discover.semi.org/ultrapure-water-webinar-registration.html |
ACCESS INFORMATION | https://discover.semi.org/ultrapure-water-webinar-registration.html |
PROVIDER INSTITUTION | SEMI |
PROVIDER CONTACT | name: Laura Nguyen, Paul Trio email: lnguyen@semi.org, ptrio@semi.org |
TEACHERS | T1- Slava Libman, FTD Solutions T2- Gary Van Schooneveld, CT Associates |
TYPE OF COURSE | ☒ On-line (stand-alone) |
DATES EXPECTED OPENING | Available now |
DATES AVAILABILITY | ☒ 365 days accessible |
WORKLOAD STUDENT | 0.5 hours |
ECTS | |
ECVET points | |
TYPE OF TRAINING | ☒ Work-based training |
EQF LEVELS | ☒ EQF 3 |
LANGUAGES | ☒ English |
MAIN SUBJECT | ☒ Fundamentals of microelectronics manufacturing |
COURSE DESCRIPTION | This course describes the SEMI Standards enabling advanced processes contamination control and provides a case study of the use of specific SEMI Standards to address pressing industry needs. The webinar has been recorded with the goal of assisting semiconductor and supply chain professionals involved in the many aspects of contamination control, including UPW and liquid chemical suppliers dealing with liquid treatment and delivery systems. Technical Background Advanced semiconductor manufacturing has reached the current limits of metrology measuring contamination on both the wafers and in the high purity materials. Furthermore, ability of the most advanced filters to control particles in sub-10nm range is also limited. Finally, particle shedding of sub-10nm particles from high-purity components located post-filter cannot be directly measured and only be estimated using power-law extrapolation. The Liquid Chemical Technical Committee – within the SEMI Standards Program – works closely with the Yield Enhancement IFT – an internationally-focused team within the IRDS – to establish the methodology to enable proactive technology management in the space of contamination control. |
KEYWORDS | KW1-standards KW2-ultrapure water, UPW KW3-liquid chemicals KW4-contamination control KW5-advanced node KW6-yield enhancement KW7-quality control Add as many lines as needed |
LEARNING OBJECTIVES | LO1- Provide an overview of SEMI Standards enabling advanced processes contamination control and provides a case study of the use of specific SEMI Standards to address pressing industry needs. LO2- Assist semiconductor and supply chain professionals involved in the many aspects of contamination control, including UPW and liquid chemical suppliers dealing with liquid treatment and delivery systems |
PREREQUISITES | No entry requirements |